獲廠商認可!陸企成功研發5nm蝕刻機 將 - 工程師
By Bethany
at 2020-08-09T14:48
at 2020-08-09T14:48
Table of Contents
以下純屬個人推測
AMEC在半導體設備上,確實挖了不少其他設備商的人,如LAM,AMAT..
也做出了不少相關的半導體設備,在蝕刻領域主要是做CCP chamber。
相較於大廠,在機台能力上還有一段明顯差距,但是有一點很重要,就是便宜。
便宜的機器確實做不了5nm,但是晶片可不是從FEOL 到BEOL都是5nm,在後段的damasce
ne trench可以是50nm,80nm的大小。用便宜的AMEC來做,也不會差別家太多。
AMEC打入GG的設備供應商,即便是最後段的passivation ETCH,吃下來就是它的layer,
就是它的商機。5nm的critical layer肯定不會是用AMEC的機器,但是5nm晶片的PASSIVAT
ION或是Top via可能是用AMEC啊。
雖然這樣要說AMEC可以做5nm蝕刻機,是吹牛吹很大,但是背後的貓膩,要看的懂。
--
AMEC在半導體設備上,確實挖了不少其他設備商的人,如LAM,AMAT..
也做出了不少相關的半導體設備,在蝕刻領域主要是做CCP chamber。
相較於大廠,在機台能力上還有一段明顯差距,但是有一點很重要,就是便宜。
便宜的機器確實做不了5nm,但是晶片可不是從FEOL 到BEOL都是5nm,在後段的damasce
ne trench可以是50nm,80nm的大小。用便宜的AMEC來做,也不會差別家太多。
AMEC打入GG的設備供應商,即便是最後段的passivation ETCH,吃下來就是它的layer,
就是它的商機。5nm的critical layer肯定不會是用AMEC的機器,但是5nm晶片的PASSIVAT
ION或是Top via可能是用AMEC啊。
雖然這樣要說AMEC可以做5nm蝕刻機,是吹牛吹很大,但是背後的貓膩,要看的懂。
--
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工程師
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